Optical absorption and graphitic clusters of hydrogenated amorphophous carbon thin films

The optical absorption of hydrogenated amorphous carbon films (a‐C:H) was measured by spectroscopic ellipsometry. The a‐C:H films were deposited at different substrate temperatures by rf‐plasma of methane. A volume distribution of graphitic cluster size was assumed to reproduce the experimental spec...

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Detalhes bibliográficos
Autores: Pascual Miralles, Esther, Serra Rodríguez, Carmen, Bertrán Serra, Enric
Tipo de documento: artigo
Estado:Versão publicada
Data de publicação:1991
País:España
Recursos:Universidad de Barcelona
Repositório:Dipòsit Digital de la UB
OAI Identifier:oai:diposit.ub.edu:2445/32237
Acesso em linha:https://hdl.handle.net/2445/32237
Access Level:Acceso aberto
Palavra-chave:Carboni
Pel·lícules fines
Carbon
Thin films
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spelling Optical absorption and graphitic clusters of hydrogenated amorphophous carbon thin filmsPascual Miralles, EstherSerra Rodríguez, CarmenBertrán Serra, EnricCarboniPel·lícules finesCarbonThin filmsThe optical absorption of hydrogenated amorphous carbon films (a‐C:H) was measured by spectroscopic ellipsometry. The a‐C:H films were deposited at different substrate temperatures by rf‐plasma of methane. A volume distribution of graphitic cluster size was assumed to reproduce the experimental spectra of the absorption coefficient. The changes in the absorption coefficient and the optical gap, induced by deposition temperature, have been interpreted in terms of changes in the graphitic cluster size of the network. The increase in the deposition temperature produces an increase in the size of the graphitic clusters.American Institute of Physics1991info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionapplication/pdfhttps://hdl.handle.net/2445/32237Articles publicats en revistes (Física Aplicada)reponame:Dipòsit Digital de la UBinstname:Universidad de BarcelonaInglésReproducció del document publicat a: http://dx.doi.org/10.1063/1.349023Journal of Applied Physics, 1991, vol. 70, num. 9, p. 5119-5121http://dx.doi.org/10.1063/1.349023(c) American Institute of Physics , 1991info:eu-repo/semantics/openAccessoai:diposit.ub.edu:2445/322372026-05-27T06:46:51Z
dc.title.none.fl_str_mv Optical absorption and graphitic clusters of hydrogenated amorphophous carbon thin films
title Optical absorption and graphitic clusters of hydrogenated amorphophous carbon thin films
spellingShingle Optical absorption and graphitic clusters of hydrogenated amorphophous carbon thin films
Pascual Miralles, Esther
Carboni
Pel·lícules fines
Carbon
Thin films
title_short Optical absorption and graphitic clusters of hydrogenated amorphophous carbon thin films
title_full Optical absorption and graphitic clusters of hydrogenated amorphophous carbon thin films
title_fullStr Optical absorption and graphitic clusters of hydrogenated amorphophous carbon thin films
title_full_unstemmed Optical absorption and graphitic clusters of hydrogenated amorphophous carbon thin films
title_sort Optical absorption and graphitic clusters of hydrogenated amorphophous carbon thin films
dc.creator.none.fl_str_mv Pascual Miralles, Esther
Serra Rodríguez, Carmen
Bertrán Serra, Enric
author Pascual Miralles, Esther
author_facet Pascual Miralles, Esther
Serra Rodríguez, Carmen
Bertrán Serra, Enric
author_role author
author2 Serra Rodríguez, Carmen
Bertrán Serra, Enric
author2_role author
author
dc.subject.none.fl_str_mv Carboni
Pel·lícules fines
Carbon
Thin films
topic Carboni
Pel·lícules fines
Carbon
Thin films
description The optical absorption of hydrogenated amorphous carbon films (a‐C:H) was measured by spectroscopic ellipsometry. The a‐C:H films were deposited at different substrate temperatures by rf‐plasma of methane. A volume distribution of graphitic cluster size was assumed to reproduce the experimental spectra of the absorption coefficient. The changes in the absorption coefficient and the optical gap, induced by deposition temperature, have been interpreted in terms of changes in the graphitic cluster size of the network. The increase in the deposition temperature produces an increase in the size of the graphitic clusters.
publishDate 1991
dc.date.none.fl_str_mv 1991
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv https://hdl.handle.net/2445/32237
url https://hdl.handle.net/2445/32237
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv Reproducció del document publicat a: http://dx.doi.org/10.1063/1.349023
Journal of Applied Physics, 1991, vol. 70, num. 9, p. 5119-5121
http://dx.doi.org/10.1063/1.349023
dc.rights.none.fl_str_mv (c) American Institute of Physics , 1991
info:eu-repo/semantics/openAccess
rights_invalid_str_mv (c) American Institute of Physics , 1991
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv American Institute of Physics
publisher.none.fl_str_mv American Institute of Physics
dc.source.none.fl_str_mv Articles publicats en revistes (Física Aplicada)
reponame:Dipòsit Digital de la UB
instname:Universidad de Barcelona
instname_str Universidad de Barcelona
reponame_str Dipòsit Digital de la UB
collection Dipòsit Digital de la UB
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15.301629

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