Comparison between focused electron/ion beam-induced deposition at room temperature and under cryogenic conditions
This article belongs to the Special Issue Multi-Dimensional Direct-Write Nanofabrication.
| Autores: | , , , |
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| Formato: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2019 |
| País: | España |
| Recursos: | Consejo Superior de Investigaciones Científicas (CSIC) |
| Repositorio: | DIGITAL.CSIC. Repositorio Institucional del CSIC |
| OAI Identifier: | oai:digital.csic.es:10261/207996 |
| Acesso em linha: | http://hdl.handle.net/10261/207996 |
| Access Level: | acceso abierto |
| Palavra-chave: | Focused ion beam Focused electron beam-induced deposition Focused ion beam-induced deposition Nanowires |
| Resumo: | This article belongs to the Special Issue Multi-Dimensional Direct-Write Nanofabrication. |
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