Comparison between optical techniques and confocal microscopy for defect detection on thin wires
Conventional microscopy techniques, such as atomic force microscopy (AFM), scanning electron microscopy (SEM), and confocal microscopy (CM) are not suitable for on-line surface inspection of fine metallic wires. In the recent years, some optical techniques have been developed to be used for those ta...
| Autores: | , , , |
|---|---|
| Tipo de documento: | artigo |
| Data de publicação: | 2004 |
| País: | España |
| Recursos: | Universidad Complutense de Madrid (UCM) |
| Repositório: | Docta Complutense |
| Idioma: | inglês |
| OAI Identifier: | oai:docta.ucm.es:20.500.14352/51200 |
| Acesso em linha: | https://hdl.handle.net/20.500.14352/51200 |
| Access Level: | Acceso aberto |
| Palavra-chave: | 535 Surface-Deffects Óptica (Física) 2209.19 Óptica Física |
| Resumo: | Conventional microscopy techniques, such as atomic force microscopy (AFM), scanning electron microscopy (SEM), and confocal microscopy (CM) are not suitable for on-line surface inspection of fine metallic wires. In the recent years, some optical techniques have been developed to be used for those tasks. However, they need a rigorous validation. In this work, we have used confocal microscopy to obtain the topography z(x,y) of wires with longitudinal defects, such as dielines. The topography has been used to predict the light scattered by the wire. These simulations have been compared with experimental results, showing a good agreement. |
|---|