Ultrasonic nanofabrication with an atomic force microscope

Ultrasonic AFM may improve fabrication technologies on the nanometer scale. In the presence of ultrasonic vibration, hard surfaces can be indented and scratched with the tip of a soft cantilever, due to its inertia. Ultrasound reduces or even eliminates friction, and hence modifies the tip-nanoparti...

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Detalhes bibliográficos
Autor: Cuberes Montserrat, María Teresa
Formato: artículo
Fecha de publicación:2007
País:España
Recursos:Universidad de Castilla-La Mancha
Repositorio:RUIdeRA. Repositorio Institucional de la UCLM
OAI Identifier:oai:ruidera.uclm.es:10578/19678
Acesso em linha:http://hdl.handle.net/10578/19678
Access Level:acceso abierto
Palavra-chave:Atomic force microscopy
Ultrasonic force microscopy
Nanomanipulation
Nanolithography
Nanoscratching
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spelling Ultrasonic nanofabrication with an atomic force microscopeUltrasound Facilitates Nanolithography and NanomanipulationCuberes Montserrat, María TeresaAtomic force microscopyUltrasonic force microscopyNanomanipulationNanolithographyNanoscratchingUltrasonic AFM may improve fabrication technologies on the nanometer scale. In the presence of ultrasonic vibration, hard surfaces can be indented and scratched with the tip of a soft cantilever, due to its inertia. Ultrasound reduces or even eliminates friction, and hence modifies the tip-nanoparticle-surface interactions in AFM manipulation. The subsurface sensitivity of the technique makes feasible the purposed manipulation of subsurface nanoscale features by ultrasonic actuation.GIT Laboratory Journal201920192007info:eu-repo/semantics/articleapplication/pdfapplication/pdfhttp://hdl.handle.net/10578/19678reponame:RUIdeRA. Repositorio Institucional de la UCLMinstname:Universidad de Castilla-La ManchaInglésinfo:eu-repo/semantics/openAccessoai:ruidera.uclm.es:10578/196782026-05-27T07:36:41Z
dc.title.none.fl_str_mv Ultrasonic nanofabrication with an atomic force microscope
Ultrasound Facilitates Nanolithography and Nanomanipulation
title Ultrasonic nanofabrication with an atomic force microscope
spellingShingle Ultrasonic nanofabrication with an atomic force microscope
Cuberes Montserrat, María Teresa
Atomic force microscopy
Ultrasonic force microscopy
Nanomanipulation
Nanolithography
Nanoscratching
title_short Ultrasonic nanofabrication with an atomic force microscope
title_full Ultrasonic nanofabrication with an atomic force microscope
title_fullStr Ultrasonic nanofabrication with an atomic force microscope
title_full_unstemmed Ultrasonic nanofabrication with an atomic force microscope
title_sort Ultrasonic nanofabrication with an atomic force microscope
dc.creator.none.fl_str_mv Cuberes Montserrat, María Teresa
author Cuberes Montserrat, María Teresa
author_facet Cuberes Montserrat, María Teresa
author_role author
dc.subject.none.fl_str_mv Atomic force microscopy
Ultrasonic force microscopy
Nanomanipulation
Nanolithography
Nanoscratching
topic Atomic force microscopy
Ultrasonic force microscopy
Nanomanipulation
Nanolithography
Nanoscratching
description Ultrasonic AFM may improve fabrication technologies on the nanometer scale. In the presence of ultrasonic vibration, hard surfaces can be indented and scratched with the tip of a soft cantilever, due to its inertia. Ultrasound reduces or even eliminates friction, and hence modifies the tip-nanoparticle-surface interactions in AFM manipulation. The subsurface sensitivity of the technique makes feasible the purposed manipulation of subsurface nanoscale features by ultrasonic actuation.
publishDate 2007
dc.date.none.fl_str_mv 2007
2019
2019
dc.type.none.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv http://hdl.handle.net/10578/19678
url http://hdl.handle.net/10578/19678
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.publisher.none.fl_str_mv GIT Laboratory Journal
publisher.none.fl_str_mv GIT Laboratory Journal
dc.source.none.fl_str_mv reponame:RUIdeRA. Repositorio Institucional de la UCLM
instname:Universidad de Castilla-La Mancha
instname_str Universidad de Castilla-La Mancha
reponame_str RUIdeRA. Repositorio Institucional de la UCLM
collection RUIdeRA. Repositorio Institucional de la UCLM
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,198674

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