Wide Bandgap Semiconductors for MEMS and Related Process Technologies
Vegeu mpresum1de1.pdf
| Authors: | , |
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| Format: | doctoral thesis |
| Publication Date: | 2011 |
| Country: | España |
| Institution: | Universitat Autònoma de Barcelona |
| Repository: | Dipòsit Digital de Documents de la UAB |
| Language: | English |
| OAI Identifier: | oai:ddd.uab.cat:127254 |
| Online Access: | https://ddd.uab.cat/record/127254 |
| Access Level: | Open access |
| Keyword: | Semiconductor MEMS Resonator |
| Summary: | Vegeu mpresum1de1.pdf |
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