Llobet, J., Rius, G., Chuquitarqui, A., Borrisé, X., & Perez Murano, F. X. (2018). Arrays of suspended silicon nanowires defined by ion beam implantation: Mechanical coupling and combination with CMOS technology.
Chicago Style CitationLlobet, Jordi, Gemma Rius, Alex Chuquitarqui, Xavier Borrisé, and Francesc X. Perez Murano. Arrays of Suspended Silicon Nanowires Defined By Ion Beam Implantation: Mechanical Coupling and Combination With CMOS Technology. 2018.
MLA CitationLlobet, Jordi, et al. Arrays of Suspended Silicon Nanowires Defined By Ion Beam Implantation: Mechanical Coupling and Combination With CMOS Technology. 2018.
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